MONDAY November 02, 8:30am - 9:00am | Slot 2
EVENT TYPE: REGULAR SESSION
SESSION 2B
Exploring Optimal Mask Patterns
Moderator:
Takashi Sato - Kyoto Univ.
Optical proximity correction (OPC) is a process that is widely applied in advanced nodes for manufacturability optimization. It is also the most expensive and difficult process in terms of computational efforts. The first paper in this session tackles this issue with a full chip scale, high-performance and salable OPC system based on deep learning. The second paper proposes an OPC framework that uses a neural network to perform end-to-end pattern prediction and inverse lithography-technology (ILT) based OPC framework. The third paper suggests improved printability through Lammellar directed self-assembly (DSA) with guiding template design.
| 2B.1 | DAMO: Deep Agile Mask Optimization for Full Chip Scale | |
| Speaker: | Guojin Chen - Chinese Univ. of Hong Kong, Shatin, Hong Kong |
|
| Authors: | Guojin Chen - Chinese Univ. of Hong Kong, Shatin, Hong Kong Wanli Chen - Chinese Univ. of Hong Kong, Shatin, Hong Kong Yuzhe Ma - Chinese Univ. of Hong Kong, Shatin, Hong Kong Haoyu Yang - Chinese Univ. of Hong Kong, Shatin, Hong Kong Bei Yu - Chinese Univ. of Hong Kong, Shatin, Hong Kong |
|
| 2B.2 | Neural-ILT: Migrating ILT to Neural Networks for Mask Printability and Complexity Co-optimization | |
| Speaker: | Bentian Jiang - Chinese Univ. of Hong Kong, Hong Kong, Hong Kong |
|
| Authors: | Bentian Jiang - Chinese Univ. of Hong Kong, Hong Kong, Hong Kong Lixin Liu - Chinese Univ. of Hong Kong, Hong Kong Yuzhe Ma - Chinese Univ. of Hong Kong, Shatin, Hong Kong Hang Zhang - Cornell Univ., Ithaca, NY Bei Yu - Chinese Univ. of Hong Kong, Shatin, Hong Kong Evangeline F.Y. Young - Chinese Univ. of Hong Kong, Shatin, Hong Kong |
|
| 2B.3 | Guiding Template Design for Lamellar DSA with Multiple Patterning and Self-Aligned Via Process | |
| Speaker: | An-Jie Shih - National Taiwan Univ. of Science and Technology, Taiwan |
|
| Authors: | An-Jie Shih - National Taiwan Univ. of Science and Technology, Taiwan Shao-Yun Fang - National Taiwan Univ. of Science and Technology, Taipei, Taiwan Yi-Yu Liu - National Taiwan Univ. of Science and Technology, Taipei, Taiwan |
|